Chemistry in Microelectronics
Yannick Le TiecThis book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in “Front End Of the Line” which corresponds to the heart and performance of individual transistors, then moving on to the “Back End Of the Line” which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications.
Contents:
1. Chemistry in the “Front End of the Line” (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, Francois Martin, Jean-Michel Hartmann, Veronique Carron and Yannick Le Tiec.
2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maitrejean and Didier Louis.
3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying, Yannick Le Tiec and Martin Knotter.
4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti.
5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet.
Chapter 1 Chemistry in the “Front End of the Line” (FEOL) (pages 1–80): Francois Martin, Jean?Michel Hartmann, Veronique Carron and Yannick Le tiec
Chapter 2 Chemistry in Interconnects (pages 81–186): Vincent Jousseaume, Paul?Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maitrejean and Didier Louis
Chapter 3 The Chemistry of Wet Surface Preparation (pages 187–232): Yannick Le Tiec and Martin Knotter
Chapter 4 The Use and Management of Chemical Fluids in Microelectronics (pages 233–308): Christiane Gottschalk, Kevin McLaughlin, Julie Cren, Catherine Peyne and Patrick Valenti
Chapter 5 Surface Functionalization for Micro? and Nanosystems (pages 309–360): Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier?Nogues and Francoise Vinet